Title:
【発明の名称】超伝導膜の現場成長法
Document Type and Number:
Japanese Patent JPH06502450
Kind Code:
A
Abstract:
In situ vapor phase growth of thallium containing superconductors is achieved by controlling thallium volatility. Thallium volatility is controlled by providing active oxygen at the surface of the growing material and by avoiding collisions of energetic species with the growing material. In the preferred embodiment, a thallium containing superconductor is grown by laser ablation of a target, and by provision of oxygen during growth. More specifically, a source of thallium, calcium, barium, copper and oxygen is created by laser ablation of a thallium rich target, generating an ablation plume that is directed onto a heated substrate through the oxygen, with the plume passing through oxygen having a pressure from 10-2 to ten torr. Epitaxial superconducting thin films of thallium, calcium, barium, copper and oxygen have been grown by this technique. Various superconducting phases may be engineered through use of this method.
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Inventors:
James, Timothy Walton
Nilsson, Boo Joeton Lars
Nilsson, Boo Joeton Lars
Application Number:
JP50066592A
Publication Date:
March 17, 1994
Filing Date:
October 03, 1991
Export Citation:
Assignee:
SUPERCONDUCTOR TECHNOLOGIES INCORPORATED
International Classes:
C01G1/00; C01G15/00; C23C14/08; C23C14/28; C30B23/02; H01L39/24; (IPC1-7): C23C14/28; C01G1/00; C01G15/00; H01L39/24
Attorney, Agent or Firm:
Aoyama Ryo (2 outside people)