Title:
【発明の名称】繰返し制御器
Document Type and Number:
Japanese Patent JPH0677201
Kind Code:
B2
Inventors:
Masaki Ozone
Noriyuki Akasaka
Toshio Kishigami
Nakano Michio
Noriyuki Akasaka
Toshio Kishigami
Nakano Michio
Application Number:
JP7770486A
Publication Date:
September 28, 1994
Filing Date:
April 04, 1986
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
Nakano Michio
Nakano Michio
International Classes:
G05B11/36; G05B21/02; (IPC1-7): G05B11/36; G05B21/02
Domestic Patent References:
| JP55135902A | ||||
| JP55135903A | ||||
| JP6289120A |
Attorney, Agent or Firm:
Takehiko Suzue (2 outside)
Next Patent: WAFER WASHING METHOD