Title:
【発明の名称】内部透過率測定方法及び装置
Document Type and Number:
Japanese Patent JP2002540395
Kind Code:
A
Abstract:
A method and apparatus is provided for measuring the below 300nm internal transmittance of an optical material (12) comprising measuring the transmittance of a below 300nm light source (14) through at least two different pathlengths (16, 16') within a single sample of the material. The below 300nm light is transmitted through two opposing surfaces of the sample, the two opposing surfaces being spaced apart in a non-parallel relationship. The invention provides improved measurements for below 300 nm optical microlithography.
Inventors:
Butcher, Gregory El
Lognov, Stephan El
Lognov, Stephan El
Application Number:
JP2000606983A
Publication Date:
November 26, 2002
Filing Date:
March 22, 2000
Export Citation:
Assignee:
Corning Incorporated
International Classes:
G01N21/59; G01M11/00; G01N21/01; G01N21/53; G03F7/20; (IPC1-7): G01N21/59; G01M11/00; G01N21/01
Attorney, Agent or Firm:
Seiji Yanagida (1 person outside)