PURPOSE: To enable the working efficiency to be improved for cutting down on the manufacturing cost by a method wherein the waste liquid is separated into two parts i.e., gelatinous one and non-gelatinous one in a simple structure so that the non-gelatinous effluent only may be drained into an in-plant concentrated drainage line not to choke up the drainage line thereby making the replacement of a waste liquid tank unnecessary.

CONSTITUTION: The title waste liquid part 1 is composed of plural vessels such as the first overflow vessel 2 and the second vessel 3. In such a simple structure, the working efficiency of the title coating.developing device for manufacturing semiconductor can be improved due to the non-necessity of the replacement of a waste liquid tank. Furthermore, due to the simple structure, the low cost operation can be realized by draining non-gelatinous waste liquid only into an in-plant concentrated drainage line.