Title:
【発明の名称】フォトマスク検査方法及び検査装置
Document Type and Number:
Japanese Patent JP2675628
Kind Code:
B2
Inventors:
Hiroshi Hashimoto
Application Number:
JP17216489A
Publication Date:
November 12, 1997
Filing Date:
July 03, 1989
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01N21/88; G01N21/956; G03F1/84; H01L21/027; H01L21/30; (IPC1-7): G03F1/08; G01N21/88; H01L21/027
Domestic Patent References:
| JP5648631A | ||||
| JP5710925A | ||||
| JP5921023A |
Attorney, Agent or Firm:
Tetsuo Hirado