Title:
【発明の名称】熱アーチ状ビームマイクロ電子機械装置および関連の製造方法
Document Type and Number:
Japanese Patent JP2001518677
Kind Code:
A
Abstract:
A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
Inventors:
Dürer, Vijayakmal Earl
Wood, Robert El
Mahadevan, Ramaswami
Wood, Robert El
Mahadevan, Ramaswami
Application Number:
JP2000513300A
Publication Date:
October 16, 2001
Filing Date:
August 28, 1998
Export Citation:
Assignee:
Kronos Integrated Micro Systems, Inc.
International Classes:
B81C1/00; F03G7/06; F15C5/00; F16K99/00; H01H1/00; B81B3/00; H01H61/00; H01H61/02; H01H65/00; H04Q1/16; G02B6/38; G02B6/42; H01H9/14; H01H67/26; (IPC1-7): H01H61/00; B81B3/00; B81C1/00; F15C5/00; H04Q1/16
Attorney, Agent or Firm:
Okuyama Shoichi (2 outside)