Title:
【発明の名称】高解像光ビーム走査装置
Document Type and Number:
Japanese Patent JP2613600
Kind Code:
B2
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Inventors:
Takanori Hisada
Ariki Mio
Shunichi Taguchi
Maruyama Takesuke
Ariki Mio
Shunichi Taguchi
Maruyama Takesuke
Application Number:
JP23618587A
Publication Date:
May 28, 1997
Filing Date:
September 22, 1987
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G02B26/12; G02B13/00; G02B26/10; (IPC1-7): G02B26/10; G02B13/00; G02B26/10
Domestic Patent References:
| JP61245129A | ||||
| JP5667816A | ||||
| JP61109422U |
Attorney, Agent or Firm:
Junnosuke Nakamura