Title:
【発明の名称】ウエーハの検査方法及び装置
Document Type and Number:
Japanese Patent JP2890082
Kind Code:
B2
Inventors:
YOSHIZAWA KATSUO
OKADA MAMORU
OOKI YOSHI
OKADA MAMORU
OOKI YOSHI
Application Number:
JP35806191A
Publication Date:
May 10, 1999
Filing Date:
December 27, 1991
Export Citation:
Assignee:
SHINETSU HANDOTAI KK
NAGANO DENSHI KOGYO KK
NAGANO DENSHI KOGYO KK
International Classes:
B23Q17/20; G01N21/88; G01N21/956; H01L21/304; H01L21/66; (IPC1-7): H01L21/66; G01N21/88; H01L21/304
Domestic Patent References:
| JP4368146A | ||||
| JP4225229A | ||||
| JP492443A |
Attorney, Agent or Firm:
Koichi Tateno