Title:
【発明の名称】シールドされたカソードを有する電子ソース
Document Type and Number:
Japanese Patent JP2002500809
Kind Code:
A
Abstract:
An electron beam source includes a cathode having an electron emission surface including an active area for emission of electrons and a cathode shield assembly including a conductive shield disposed in proximity to the electron emission surface of the cathode. The shield has an opening aligned with the active area. The electron beam source further includes a device for stimulating emission of electrons from the active area of the cathode, electron optics for forming the electrons into an electron beam and a vacuum enclosure for maintaining the cathode at high vacuum. The cathode may be a negative electron affinity photocathode formed on a light-transmissive substrate. The shield protects non-emitting areas of the emission surface from contamination and inhibits cathode materials from contaminating components of the electron beam source. The cathode may be moved relative to the opening in the shield so as to align an new active area with the opening. Getter materials and sources of activation material may be incorporated into the shield assembly.
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Inventors:
Baum, Aaron, W
Schneider, James, E, Junior
Schneider, James, E, Junior
Application Number:
JP50067099A
Publication Date:
January 08, 2002
Filing Date:
April 23, 1998
Export Citation:
Assignee:
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
International Classes:
H01J37/06; G03F7/20; H01J1/34; H01J3/02; H01J7/18; H01J27/04; H01J37/073; (IPC1-7): H01J1/34; H01J7/18; H01J37/073
Attorney, Agent or Firm:
Sumio Takeuchi (1 outside)