Title:
【発明の名称】パーティクルモニター装置およびこれを具備した無塵化プロセス装置
Document Type and Number:
Japanese Patent JP2982720
Kind Code:
B2
Abstract:
A particle monitor comprises a light source (11) for emitting a light ; a transmitter for transmitting the light into a space having particles over a wafer in a wafer processing system (12) to irradiate the light to the particles for causing a scattered light ; a photo-detector (13) for detecting the scattered light or luminance to generate output signals corresponding to the intensity of the scattered light ; a signal intensity judgment device (14) for receiving the output signals from the photo-detector (13) and comparing the output signals with a predetermined reference value already set in the signal intensity judgment device (14) so as to judge whether the intensity of the scattered light is higher or lower than the predetermined reference value ; and a display (15) for at least either displaying intensity of the scattered light and luminance and distributions in intensity thereof or displaying distributions in size and the number of particles.
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Inventors:
UESUGI FUMIHIKO
ITO NATSUKO
ITO NATSUKO
Application Number:
JP30136196A
Publication Date:
November 29, 1999
Filing Date:
October 25, 1996
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
G01N15/02; G01N15/14; G01N21/21; G01N21/47; G01N21/49; H01L21/66; (IPC1-7): G01N15/14; G01N21/21; G01N21/49; H01L21/66
Domestic Patent References:
| JP4204039A | ||||
| JP339635A | ||||
| JP424535A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)