An inspection method of minute particles - Sumika Chemical Analysis Service Co., Ltd.

Title:

An inspection method of minute particles

Document Type and Number:

Japanese Patent JP6027724

Kind Code:

B2

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Inventors:

Kenji Terada
Makoto Makoto
Kazuhiro Nakatsu

Application Number:

JP2011098524A

Publication Date:

November 16, 2016

Filing Date:

April 26, 2011

Export Citation:

Assignee:

Sumika Chemical Analysis Service Co., Ltd.

International Classes:

G01N15/02

Domestic Patent References:

Attorney, Agent or Firm:

Harakenzo world patent & trademark

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