Title:
【発明の名称】気化器及びこれを用いた液体供給装置
Document Type and Number:
Japanese Patent JP3270055
Kind Code:
B2
Abstract:
A liquid vaporizer includes a stack of coaxially aligned, thermally conductive, thin, flat disks having different diameters. The larger diameter disks each include at least one aperture and preferably a plurality of closely spaced apertures radially located a predetermined distance from the center of the disk. The vaporizer further includes means for establishing a liquid film on at least a portion of the surfaces of the larger diameter disks and for accelerating the vaporization of the liquid thereon by passing a gas through the apertures of the larger diameter disks over the liquid film on the portion of the surfaces of the larger diameter disks.
Inventors:
Ewing, James H
Application Number:
JP52573896A
Publication Date:
April 02, 2002
Filing Date:
February 13, 1996
Export Citation:
Assignee:
MK Instruments Incorporated
International Classes:
B01D1/00; B01D1/22; B01D3/34; B01J4/00; B01J7/02; F24J3/00; (IPC1-7): B01J7/02; B01D1/00; B01J4/00
Domestic Patent References:
| JP2112328U |
Other References:
【文献】米国特許414207(US,A)
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)
Previous Patent: 蛍光体画素を対応電界エミッタに整列させる内部構造を有する電界放出装...
Next Patent: HEAT-DISSIPATING MEMBER FOR SEMICONDUCTOR SHIP AND SEMICONDUCTOR PACKAGE
Next Patent: HEAT-DISSIPATING MEMBER FOR SEMICONDUCTOR SHIP AND SEMICONDUCTOR PACKAGE