【発明の名称】加工ステーションへの加工部材の送り作業装置

Japanese Patent JP3353085

B2

The invention relates to a device for carrying out a precise adjusting movement, oriented in the plane of the X- and/or Y- direction, of a bond head, designed for example as a gripper, with respect to a work station. One preferred exemplary embodiment of the device (100) comprises essentially a sliding plate (15), a supporting element (20), a first and second drive (25, 30), for carrying out the said adjusting movements, a guide device (50), provided with a sliding part (60) and guide part (51), as well as an integrated measuring device (80) for detecting the movements of the supporting element (20) oriented in the X- and/or Y- direction. In the device (100), the supporting element (20) is supported in the horizontal plane with translation and rotation degrees of freedom by means of an air bearing (1), which can be pretensioned with a vacuum, on the sliding plate (15) and vertically with an air bearing (3), which can be pretensioned with a vacuum, on the sliding part (60), the sliding part (60) additionally being supported with an air bearing (2), which can be pretensioned with a vacuum, on the sliding plate (15) and with a back-pressure air bearing (4) between two webs (53, 54) of the guide part (51).

Claudio Meisser
Hans Egenschwiller
Walter Nails

JP29939188A

December 03, 2002

November 25, 1988

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Essec Trading Society Anonym

B23K20/00; B23Q1/00; B23Q1/26; B23Q1/38; B23Q1/48; B21D43/00; B23Q1/62; B23Q7/08; F16C32/06; G05D3/00; H02K5/16; H02K41/035; (IPC1-7): B23Q1/00; B21D43/00; B23Q7/08; F16C32/06; G05D3/00

JP6091021A
JP61214934A
JP61252049A
JP61230836A
JP61209831A
JP60127932A

US4654571A

【文献】米国特許4654571(US,A)

Eiji Saegusa (2 others)

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