ILLUMINATING OPTICAL SYSTEM FOR MICROSCOPE

Title:

ILLUMINATING OPTICAL SYSTEM FOR MICROSCOPE

Document Type and Number:

Japanese Patent JP2002006223

Kind Code:

A

Abstract:

To provide an illuminating optical system for a microscope capable of obtaining a bright image by suppressing the intensity reduction of illuminating light and scattered light.

The illuminating light is emitted from a light source. The illuminating light emitted from the light source is reflected by a reflection mirror. The illuminating light reflected by the reflection mirror is transmitted through an objective lens so that an object to be observed may be illuminated, and also, the scattered light from the object to be observed is converged by the objective lens. The luminous flux scattered by the object to be observed and then converged by the objective lens reaches a light receiving surface through a through-hole formed in the reflection mirror.

Inventors:

MIYATAKE TSUTOMU

Application Number:

JP2000188635A

Publication Date:

January 09, 2002

Filing Date:

June 23, 2000

Export Citation:

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Assignee:

SUMITOMO HEAVY INDUSTRIES

International Classes:

G02B21/06; G03F9/00; H01L21/027; (IPC1-7): G02B21/06; G03F9/00; H01L21/027

Attorney, Agent or Firm:

Keishiro Takahashi (2 outside)

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