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Title:
MICROSCOPE PROVIDED WITH FUNCTION FOR COMPENSATING ROGATION OF POLARIZING DIRECTION
Document Type and Number:
Japanese Patent JP2002006222
Kind Code:
A
Abstract:

To provide a microscope cable of compensating the rotation of polarized light with a simple configuration even in the case of using a high- performance objective lens.

The microscope is provided with the objective lens 8 for condensing a luminous flux of linearly polarized light from illuminating optical systems 1 to 6 and projecting the luminous flux to a sample, and also, transmitting the luminous flux reflected by the sample, and a compensation optical system 104 for compensating the rotation of the luminous flux of the linearly polarized light in the polarizing direction caused by the objective lens 8. The compensation optical system 104 includes two compensating objective lenses 11 and 12 whose optical characteristics are the same as that of the objective lens 8 and a polarizing direction converting part 14 for converting the inclination in the polarizing direction. Two compensating objective lenses 11 and 12 of the compensation optical system 104 are arranged so that the focal positions 13 may face each other, and the polarizing direction converting part 104 is arranged closer to the objective lens 8 than the two compensating objective lenses 11 and 12.


Inventors:
TOSHIMITSU KUNIO
Application Number:
JP2000187753A
Publication Date:
January 09, 2002
Filing Date:
June 22, 2000
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B21/06; (IPC1-7): G02B21/06
Attorney, Agent or Firm:
Sanshin Iwao (1 person outside)