Title:
照明光学装置およびそれを備えた検査装置
Document Type and Number:
Japanese Patent JP3997761
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a lighting optical apparatus that can emit illumination light of uniform intensity distribution uniform in special and angular view points, and to provide an inspection device provided with the lighting optical apparatus. SOLUTION: In this apparatus, a light soured 31, a first optical system 32 for condensing light from the light source, a rod type optical integrator 22, a second optical system 23 for condensing light from the rod type optical integrator, and bundle type random light guide 24 are arranged in order. The rod type optical integrator 22 has a light-incident face 22a arranged in a light soured image forming face for a light source image formed by the first optical system 32 or in a face conjugated with the forming face, and a light emitting face 22b arranged in a front side focal face of the second optical system 23. The bundle type random light guide 24 has a light-incident face 24a arranged in a light source image forming face for a light source image formed by the second optical system 23 or in a face conjugated with the forming face, and a light emitting face 24b for emitting illumination light to the outside.
Inventors:
Takeo Omori
Application Number:
JP2001353571A
Publication Date:
October 24, 2007
Filing Date:
November 19, 2001
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01N21/84; F21S2/00; F21V13/00; G01N21/956; G02B19/00; F21Y101/00
Domestic Patent References:
| JP1271718A | ||||
| JP8190202A | ||||
| JP8288205A | ||||
| JP10270312A |
Attorney, Agent or Firm:
Furuya Fumio