Title:
画像形成方法
Document Type and Number:
Japanese Patent JP4490864
Kind Code:
B2
Abstract:
A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.
More Like This:
Inventors:
Kohei Yamaguchi
Aoki Kazuo
Kenji Ohara
Aoki Kazuo
Kenji Ohara
Application Number:
JP2005132677A
Publication Date:
June 30, 2010
Filing Date:
April 28, 2005
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01N23/225; G06T1/00; H01J37/22; H01L21/66
Domestic Patent References:
| JP2002310962A | ||||
| JP2001202915A | ||||
| JP2001093950A | ||||
| JP2000187012A | ||||
| JP2001155674A | ||||
| JP200099705A |
Foreign References:
| US6040191 | ||||
| WO2003044821A1 |
Attorney, Agent or Firm:
Yusuke Hiraki