Title:
IMAGE MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP3823477
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an image measurement device capable of measuring the geometric information on marks with high precision even if the positioning precision of the marks in a visual field is comparatively rough.
SOLUTION: This measuring device obtains the images of marks 25, 27, and measures geometric information on the marks. In a correction data hold portion 37, the positional deviation of a measured reference value in a state where the marks are positioned at the reference position of the visual field of a device and a measured general value in a state where the marks are positions at the general position of the visual field is previously held as correction data corresponding to a visual field coordinate. In a position deviation correcting portion 39, the deviation of the marks are corrected corresponding to the positions in the visual field of the marks.
Inventors:
Koji Ochiai
Chiaki Yamada
Chiaki Yamada
Application Number:
JP25409597A
Publication Date:
September 20, 2006
Filing Date:
September 04, 1997
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B11/00; G01N21/88; G01N21/93; G01N21/956; G06T1/00; G06T7/00; G06T7/60; (IPC1-7): G01B11/00; G01N21/88; G06T7/00
Domestic Patent References:
| JP6241724A | ||||
| JP961121A |
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