Title:
IMAGE OBSERVATION APPARATUS AND METHOD
Document Type and Number:
Japanese Patent JP2001083087
Kind Code:
A
Abstract:
To reduce sample damages due to electron beams and at the same time, efficiently read a CL(cathode luminescence) image signal.
The wavelength dispersion of CL is made by a diffraction grating 24, and a multi-channel photomultiplier 23 is arranged on the Rowland circle of the diffraction grating for receiving CL which is subjected to wavelength dispersion A. secondary electron image by a secondary electron detector 4 is composited with a wavelength dispersed CL image, according to a detector array as the multi-channel photomultiplier 23, using an image compositing means 35.
Inventors:
ORAKU HIDEAKI
NAKAYAMA YOSHIHIKO
OIKAWA TAKATOSHI
TANAKA RYUICHI
NAKAYAMA YOSHIHIKO
OIKAWA TAKATOSHI
TANAKA RYUICHI
Application Number:
JP25766099A
Publication Date:
March 30, 2001
Filing Date:
September 10, 1999
Export Citation:
Assignee:
HITACHI LTD
HITACHI SCIENCE SYSTEMS LTD
HITACHI SCIENCE SYSTEMS LTD
International Classes:
H01J37/22; G01N21/62; G01N21/63; G01N23/22; (IPC1-7): G01N21/62; G01N23/22
Attorney, Agent or Firm:
Yusuke Hiraki
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