To increase efficiency of the processing to form an image of a measuring object by facilitating work to allot an image pick-up objective region of a camera and composing processing of the image.
An overall image of a substrate S is formed by composing the image provided at each of the image pick-up positions by driving the camera 1 mounted on a head end of an arm part 3 by positioning it at a plurality of the positions above the testing objective substrate S. The measuring objective region connecting a plurality of rectangular processing regions smaller than a field of view of the camera 1 and equal in size to each other is set for the substrate S. Additionally, the image provided by picking up it up by sequentially adjusting a center of the field of view of the camera 1 to a central point of each of the processing regions is rotated and corrected in accordance with a deflecting angle of the arm part 3 in picking up the image. Furthermore, the overall image of the substrate S is formed by extracting the image of the processing region from each of the rotated and corrected images and connecting them to each other in accordance with arrangement of the processing region.
COPYRIGHT: (C)2006,JPO&NCIPI
Kiyoshi Murakami
Masato Ishiba
Asano Yasunori
Teruhisa Yotsuya
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