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Title:
IMAGE PROCESSOR
Document Type and Number:
Japanese Patent JP2008082824
Kind Code:
A
Abstract:

To provide an image processor of a multiple imaging head system, which is desired to materialize, for efficiently operating a plurality of image processing parts, since the plurality of image processing parts of the multiple imaging head system complicate operation for controlling the respective image processing parts to increase a burden on an operator.

This image processor comprises a specimen base, a plurality of imaging parts imaging a measuring object on the specimen base, the plurality of image processing parts processing image signals of the measuring object taken by the plurality of imaging parts, a display part displaying outputs from the processing parts, an input/output switching part, and a control part controlling the plurality of image processing parts and the switching part. The switching part is controlled based on the control of the control part while any output signal of the output signals of the plurality of processing parts is displayed on the display part.


Inventors:
OTSUKA SHIGENOBU
Application Number:
JP2006262123A
Publication Date:
April 10, 2008
Filing Date:
September 27, 2006
Export Citation:
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Assignee:
HITACHI INT ELECTRIC INC
International Classes:
G01B11/02; G01B11/30; G01N21/84; G06T1/00; H01L21/66
Attorney, Agent or Firm:
Polaire Patent Business Corporation