Title:
IMAGE PROJECTION DEVICE AND METHOD
Document Type and Number:
Japanese Patent JP2718421
Kind Code:
B2
Abstract:
PURPOSE: To provide an image projection system for all surfaces of a three- dimensional object such as a polyhedron.
CONSTITUTION: An image pattern is projected from mask patterns 5 and 8 provided at different levels 3 and 4 directly or through reflection. The mask patterns are doubled but do not overlap each other, and the above levels are separated by a distance H being related to the size of an object. A conductor due to photolithography can be printed simultaneously on the upper surface and all side surfaces of a three-dimensional stack of an integrated circuit chip by the device and process.
Inventors:
Paul William Coteus
Douglas Seymour Goodman
Douglas Seymour Goodman
Application Number:
JP17422794A
Publication Date:
February 25, 1998
Filing Date:
July 26, 1994
Export Citation:
Assignee:
International Business Machines Corporation
International Classes:
G03F7/20; G03F7/24; H01L21/027; (IPC1-7): H01L21/027; G03B27/32; G03F7/20
Domestic Patent References:
| JP1302722A | ||||
| JP4326717A | ||||
| JP59923A |
Attorney, Agent or Firm:
Kiyoshi Goda (2 outside)
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