Title:
IMAGE SENSOR AND IMAGING APPARATUS
Document Type and Number:
Japanese Patent JP2017126666
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To suppress a decrease in sensitivity in the case that a metallic reflective layer is provided on side surfaces of respective sensor elements or bottom surfaces of element isolation grooves via an insulator film so as to suppress optical crosstalk.SOLUTION: An image sensor is provided with: a sensor element array 3 which includes a common lower contact layer 6, light absorption layers 7 and upper contact layers 8 and in which a plurality of sensor elements 10 separated by element isolation grooves 9 are arranged in an array shape; and a reading circuit chip which is connected to the sensor element array and is provided with the reading circuit. The sensor element array is provided with; insulator films 38 covering side surfaces of the plurality of sensor elements and bottom surfaces of the element isolation grooves; and metallic reflective layers 37 provided on the side surfaces of the plurality of sensor elements and the bottom surfaces of the element isolation grooves via the insulator films. The metallic reflective layers are short-circuited so that they have the same potential as common lower contact layers when bias voltage is applied to the plurality of sensor elements from the reading circuit chip.SELECTED DRAWING: Figure 1
Inventors:
NISHINO HIROSHI
OZAKI KAZUO
MATSUMIYA YASUO
MIYATAKE TETSUYA
OZAKI KAZUO
MATSUMIYA YASUO
MIYATAKE TETSUYA
Application Number:
JP2016005312A
Publication Date:
July 20, 2017
Filing Date:
January 14, 2016
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L27/146; H01L27/144; H04N5/33; H04N5/369
Attorney, Agent or Firm:
Yu Sanada
Masahisa Yamamoto
Masahisa Yamamoto