To provide an immersing type processing apparatus and method which can suppress a gas from dispersing into the atmosphere outside the processing apparatus when extracting the object from a liquid.
In the processing apparatus and method, the air blown from an air blower 5 is sent to first and second gas jetting nozzles 4a, 5a. The airs jetted out respectively from the first and second gas jetting nozzles 4a, 5a are sucked respectively into first and second gas sucking nozzles 4b, 5b so as to form two sets of air curtains in a releasing portion 1a. When extracting the object 32 from the releasing portion 1a to the outside of a container 1, a liquid 31 left on the whole surface of the object 32 is blown away enough by the airs blown down respectively from the first and second gas jetting nozzles 4a, 5a.
MORITA HIROSHI
KUROBE HIROSHI
KAMETANI SHIGEJI
| JPH09194887A | 1997-07-29 | |||
| JPH049773A | 1992-01-14 | |||
| JPH0684859A | 1994-03-25 | |||
| JP2005136437A | 2005-05-26 |