Title:
IMPRINT DEVICE AND METHOD OF MANUFACTURING ARTICLE
Document Type and Number:
Japanese Patent JP2015198110
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an imprint device which is advantageous when light from a light source is distributed to a plurality of processing parts.SOLUTION: Disclosed is an imprint device for molding an imprint material on a substrate using a mold in which a pattern is formed. This imprint device includes: a plurality of processing parts, each of which processes curing of the imprint material by irradiating the imprint material with light in a state where the mold and the imprint material are brought into contact with each other; a generating part which generates a plurality of luminous fluxes used in the plurality of processing parts; and a plurality of light guide parts, each of which guides each of the plurality of luminous fluxes generated by the generating part to each of the plurality of processing parts. The generating part has a division part which generates the plurality of luminous fluxes by performing wavefront splitting to light from a light source.
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Inventors:
SHINODA KENICHIRO
Application Number:
JP2014073732A
Publication Date:
November 09, 2015
Filing Date:
March 31, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; B29C59/02; G02B19/00
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu