To improve the resolution with a given beam current by providing a lighting subsystem for increasing the average distance between charged particles within a particle beam in at least one lighting crossover image.

A lighting optical system 212 and an imaging optical system 214 are arranged about on a center axis 210, and spaced from a reticule (for example, mask) 220 set vertically to the center axis 210. A ring opening 240 is inserted vertically to the central axis of a crossover image 224b between a condenser lens 217 and a lighting lens 218. The ring opening 240 increases the average distance between electrons in the electron beam in the crossover image and the conjugate image succeeding thereto when the electron beam is changed from substantial, type to hollow type. If the ring opening 240 removes 50% beam current with a necessary current I, the throughput can be kept when the current is set to 2H, and the resolution can be increased. The orbit slippage aberration of the system can be reduced by 30% by numerical calculation.