PURPOSE: To moderate the change in the composition between a substrate and a rigid carbon film to improve the adhesion between the substrate and the carbon film by forming a rigid carbon film on the substrate comprising soda lime glass through an intermediate film such as a metal film or semiconductor film.

CONSTITUTION: The material of an intermediate film 2 is selected from W, Mo, Ti, Zr, Ta, Hf, Cr, Si, ZrSix (x is 1-100) and their carbides. An intermediate film 2 having a thickness of 10-10000 is formed on a substrate 1 comprising soda lime glass. A rigid carbon film having a thickness of 0.001-100μm is further formed on the intermediate film 2.