PURPOSE: To manufacture super fine particle powder having uniform and small grain size by rapidly cooling by using liquefied gas after vaporizing a solid material by using high temp. plasma.
CONSTITUTION: In the plasma torch A, gas of Ar, etc., from supply sources 7W9 is supplied into a silica tube 1 from injection holes 4W6 and made to high temp. plasma with a coil 2 for oscillating high frequency. To this high temp. plasma, the solid material powder of metal, etc., from a raw material powder supply device E is instroduced into a silica double tube B through carrier gas 11 and vaporized. The vapor of this solid material is rapidly cooled and solidified with a cooling double tube C passing through the liquefied gas at gap between inner tube 14 and outer tube 15. As the liquefied gas, one or more kinds of liquid He, H2, Ar, N2, O2, air CO2 are used. The super fine powder formed with this is recovered with the product recovering part F providing a filter 18 from a chamber D for executing water cooling.
FUYUKI TADASHI
KURODA EISUKE
| JPS5340583A | 1978-04-13 | |||
| JPS60826A | 1985-01-05 | |||
| JPS61261406A | 1986-11-19 |
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