不純物評価方法及び不純物評価プログラム

Title:

不純物評価方法及び不純物評価プログラム

Document Type and Number:

Japanese Patent JP6741250

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide an impurity evaluation method and an impurity evaluation program, capable of accurately attaining relationship between distribution or diffusion behavior for each chemical state of a metal impurity and a structural characteristic of a sample.SOLUTION: An impurity evaluation method includes: a chemical state evaluation step of irradiating a sample measurement region with measurement γ ray, and mapping a chemical state of a metal impurity for each metal component, with a microscopic Moessbauer spectroscopy; a structure observation step of irradiating a measurement region measured in the chemical state evaluation step with electronic ray, and observing a surface or observing an electrically active defect based on electronic ray induced current, with a scanning electron microscopy; and a structure analysis step of irradiating the measurement region measured in the chemical state evaluation step with electron ray, and analyzing crystal orientation or internal distortion distribution, with an electron backscattering diffraction method.SELECTED DRAWING: Figure 13

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Inventors:

Yutaka Yoshida
Yuji Ino
Hiroyoshi Soejima
Hayakawa Issei
Kenichi Gyohira
Kimura Keiko

Application Number:

JP2016103359A

Publication Date:

August 19, 2020

Filing Date:

May 24, 2016

Export Citation:

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Assignee:

Shizuoka Institute of Technology
Apco Co., Ltd.

International Classes:

G01N23/095; G01N23/18; G01N23/20058; G01N23/203; G01N23/2206; G01N23/2251

Domestic Patent References:

JP2004006545A

Foreign References:

WO2008143101A1
CN104677925A

Other References:

伊野裕司ら,「多結晶Si太陽電池評価のための顕微メスバウア分光装置の開発」,第63回応用物理学会春季学術講演会[講演予稿集](DVD-ROM),2016年 3月 3日,p.13-056,21a-P8-12
吉田豊,「太陽電池評価のための3D顕微メスバウア分光装置の開発」,先端計測分析技術・機器開発プログラム新技術説明会の発表資料,科学技術振興機構(JST),2015年 3月23日

Attorney, Agent or Firm:

Yoshiki Hasegawa
Yuji Suwa
Omori Tetsuhei

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