Title:
INDICATING METHOD FOR EFFECTIVE CHIP
Document Type and Number:
Japanese Patent JPH065482
Kind Code:
A
Abstract:
PURPOSE: To easily discriminate an effective chip by putting a mark on the outermost periphery of effective chips on a water.
CONSTITUTION: In the process of working a wafer 1, a resist pattern of an arrow mark 4 is formed on the outermost periphery of effective chips 5, when aluminum wiring or a final pattern is formed. By etching, a pattern such as an arrow mark, a -mark and a ×-mark is left on the outermost periphery of the effective chips 5 on the wafer. Thereby only the effective chip on the wafer can be surely transferred to a tray.
Inventors:
YAMADA KATSUHIKO
Application Number:
JP16489392A
Publication Date:
January 14, 1994
Filing Date:
June 23, 1992
Export Citation:
Assignee:
SEIKO INSTR INC
International Classes:
H01L21/02; (IPC1-7): H01L21/02
Attorney, Agent or Firm:
Keinosuke Hayashi
Next Patent: ALIGNING METHOD FOR SEMICONDUCTOR CRYSTAL SUBSTRATE