Title:
INERTIA SENSOR, ELECTRONIC APPARATUS, AND MOVABLE MEMBER
Document Type and Number:
Japanese Patent JP2020118609
Kind Code:
A
Abstract:
To provide an inertia sensor, an electronic apparatus, and a movable member capable of more reliably exhibiting functionality as a stopper and having excellent mechanical strength.SOLUTION: The inertia sensor, when mutually orthogonal three axes are defined as axis X, axis Y and axis Z, comprises: a substrate; a movable member oscillating around an oscillation axis running along the axis Y; a fixed part supporting the movable member and fixed to the substrate; and a stopper fixed to the substrate and restricting the rotational displacement of the movable member around the axis Z by coming in contact with the movable member. The stopper includes a first stopper facing the movable member along the axis Y, with its clearance from the oscillation axis being L1, and a second stopper facing the movable member along the axis Y, with its clearance from the oscillation axis being L2 which is shorter than the L1. The movable member, when rotationally displaced, comes in contact with the first and second stoppers at the same time.SELECTED DRAWING: Figure 1
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Inventors:
NAGATA KAZUYUKI
Application Number:
JP2019011483A
Publication Date:
August 06, 2020
Filing Date:
January 25, 2019
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01P15/08; B81B3/00; G01P15/125; H01L29/84
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi