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Title:
INERTIA SENSOR
Document Type and Number:
Japanese Patent JP2010008300
Kind Code:
A
Abstract:

To provide a sensor for simultaneously detecting a yaw rate and acceleration in two axes within a substrate surface.

The inertia sensor has an inertia sensor structure, having four in-plane vibrators in the same shape and ring beams in a structure being symmetrical with respect to a point for connecting the four in-plane vibrators that are arranged while being symmetrical with respect to a point. Concretely speaking, the inertia sensor has: the in-plane vibrators that are disposed on the extension line of two orthogonal axes at the same distance from a rotation center with the intersection of two orthogonal axes as a rotation center and supported movably in a direction parallel to a substrate surface, and have the same structure; and a link beam that mutually connects the vibrators movably in the directions of the two axes without any rotation in parallel with the substrate, has a structure that is symmetrical in respect to the rotation center, and is disposed in a region including the rotation center in a region for connecting the positions of the vibrators.


Inventors:
AKASHI TERUHISA
ERNST OBERMEIER
Application Number:
JP2008169770A
Publication Date:
January 14, 2010
Filing Date:
June 30, 2008
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01C19/56; G01C19/5733; G01P15/125; G01P15/18
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda