To provide a sensor for simultaneously detecting a yaw rate and acceleration in two axes within a substrate surface.
The inertia sensor has an inertia sensor structure, having four in-plane vibrators in the same shape and ring beams in a structure being symmetrical with respect to a point for connecting the four in-plane vibrators that are arranged while being symmetrical with respect to a point. Concretely speaking, the inertia sensor has: the in-plane vibrators that are disposed on the extension line of two orthogonal axes at the same distance from a rotation center with the intersection of two orthogonal axes as a rotation center and supported movably in a direction parallel to a substrate surface, and have the same structure; and a link beam that mutually connects the vibrators movably in the directions of the two axes without any rotation in parallel with the substrate, has a structure that is symmetrical in respect to the rotation center, and is disposed in a region including the rotation center in a region for connecting the positions of the vibrators.
ERNST OBERMEIER
Yuji Toda