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Title:
INERTIAL FORCE SENSOR
Document Type and Number:
Japanese Patent JP2014157162
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To detect angular velocity in a plurality of axial directions with one inertial force sensor while preventing false detection due to shock and vibration applied from the outside.SOLUTION: An inertial force sensor comprises: an inertial force detecting element 1 comprising weight sections 7, a connecting section composed of a first arm 2 and a second arm 3 which have flexibility, support the weight sections 7, and are formed in the same plane, a frame body 6 for holding the weight sections 7 through the connecting section, and sensing electrodes 10 for detecting angular velocity around at least two axes of rotation different in direction; supporting bodies 12 which have flexibility, support the inertial force detecting element 1 and have a board-like shape; and a housing body 11 for housing the inertial force detecting element 1 through the supporting bodies 12. The supporting bodies 12 comprise a bending section 13 in a thickness direction.

Inventors:
OKOSHI HIDEO
YOSHIUCHI SHIGEHIRO
SAKAGAMI TAKESHI
Application Number:
JP2014091403A
Publication Date:
August 28, 2014
Filing Date:
April 25, 2014
Export Citation:
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Assignee:
PANASONIC CORP
International Classes:
G01C19/5628
Domestic Patent References:
JP2006284373A2006-10-19
JP2007256234A2007-10-04
JP2007064753A2007-03-15
JP2005010034A2005-01-13
JPH0655950U1994-08-02
JPH07208997A1995-08-11
JPS6058700A1985-04-04
Attorney, Agent or Firm:
Yoshiaki Tokuda
Fujii Kentaro