INERTIAL SENSOR AND MANUFACTURING METHOD THEREOF

Title:

INERTIAL SENSOR AND MANUFACTURING METHOD THEREOF

Document Type and Number:

Japanese Patent JP2011220765

Kind Code:

A

Abstract:

To provide an inertial sensor capable of arranging electrodes, while at least keeping conventional performance though the sensor is more compact than the conventional one.

The inertial sensor of the present invention includes: electrodes 21-29 (for Z-axis direction inertia detection) and electrodes 31-39 (for X-axis direction inertia detection) which are arranged at predetermined positions on an upper surface of a substrate 10; and piezoelectric elements 61-68 (for Z-axis direction inertia detection) and piezoelectric elements 71-78 (for X-axis direction inertia detection) which are arranged at predetermined parts between the respective electrodes. The piezoelectric elements 61-68 are arranged to add voltages outputted by the respective piezoelectric elements. The piezoelectric elements 71-78 are also arranged to add voltages outputted by the respective piezoelectric elements.

Inventors:

KANDA KENSUKE
IGA YUKI
MAENAKA KAZUSUKE

Application Number:

JP2010088643A

Publication Date:

November 04, 2011

Filing Date:

April 07, 2010

Export Citation:

Click for automatic bibliography generation Help

Assignee:

JAPAN SCIENCE & TECH AGENCY
HYOGO PREFECTURE

International Classes:

G01P15/09; G01P15/18

Domestic Patent References:

JPH10282135A	1998-10-23
JPH09260735A	1997-10-03
JPH07174782A	1995-07-14
JPH0843430A	1996-02-16
JP2008190931A	2008-08-21
JPH0320635A	1991-01-29

Other References:

JPN6013026144; 神田健介、他５名: '「圧電薄膜要素の多段直列接続によるセンサ出力電圧の増倍」' 電気学会論文誌ＥＶｏｌ．　１３０，　Ｎｏ．　４, 20100401, ｐ．１２４-１２９, 一般社団法人　電気学会

Attorney, Agent or Firm:

Yasuhiro Nara

Previous Patent: CAPACITANCE TYPE PHYSICAL QUANTITY SENSOR CIRCUIT

Next Patent: OBJECT RECOGNITION DEVICE