Title:
INFRARED-RAY SENSOR
Document Type and Number:
Japanese Patent JPH05164604
Kind Code:
A
Abstract:
PURPOSE:To obtain a compact infrared-ray sensor which can enhance the integrating density of the infrared-ray sensing parts without generating crosstalk between a plurality of infrared-ray sensing parts and can be manufactured simply. CONSTITUTION:A plurality of infrared-ray sensing parts 2, 2,... are provided on one surface of a substrate 1 in an infrared-ray sensor. A heat separating space part 5 for suppressing the heat conduction between the infrared-ray sensing parts 2 and the substrate 1 is provided at a position beneath the infrared-ray sensing parts 2, 2.... An interference preventing conductor 3 for absorbing the outflow of heat from the infrared-ray sensing parts is provided between a plurality of the infrared-ray sensing parts 2, 2....
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Inventors:
HIMESAWA HIDEKAZU
IGARI MOTOO
IGARI MOTOO
Application Number:
JP35211391A
Publication Date:
June 29, 1993
Filing Date:
December 12, 1991
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01J1/02; G01J5/02; G01J5/20; H01L37/00; (IPC1-7): G01J1/02; G01J5/02; H01L37/00
Attorney, Agent or Firm:
Hiroyuki Nakai