Title:
INK JET HEAD AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3438526
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an ink jet head having a long life for satisfactorily discharging ink for a long period.
SOLUTION: After a silicon oxide film 2 is formed on a board 1, lower side metal wiring layers 3 of individual electrodes are formed to an electric connecting region 22. An insulating layer 4 is formed thereon, the previous insulating layer removing region is removed from an end of an orifice side of an electrothermal converter 23, and the layers 3 are exposed. A heating resistor layer 5 and a metal wiring layer 6 of a common electrode are formed thereon. The layer 5 is electrically connected to the wiring layer without through hole in the region 22, and hence the converter 23 becomes from the region 22 to the end of the layer 6. In addition, an inorganic protective layer 7, a tantalum layer 8 are formed. Since its constitution has less unevenness, influences of physical pressure of the bubble and stress concentration of the protective layer can be alleviated, and its life can be prolonged.
Inventors:
Takayuki Takeuchi
Kumiko Tanaka
Kumiko Tanaka
Application Number:
JP10790497A
Publication Date:
August 18, 2003
Filing Date:
April 24, 1997
Export Citation:
Assignee:
Fuji Xerox Co., Ltd
International Classes:
B41J2/05; B41J2/16; (IPC1-7): B41J2/05; B41J2/16
Domestic Patent References:
| JP2158345A | ||||
| JP2258267A |
Attorney, Agent or Firm:
Yasuo Ishii (1 outside)
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