To provide an inkjet head in which the dissolution, due to ink, of an adhesion layer bonding a channel constitution member and a substrate is prevented, thereby maintaining the adhesiveness between the channel constitution member and the substrate, as well as the ink ejection performance.
The inkjet head includes: a heat energy generating element for generating heat energy for ejecting an ink; an insulating protective layer covering the heat energy generating element; a substrate having a Ta layer provided on the insulating protective layer; and the flow channel constitution member connected to the substrate, and provided with a flow channel which runs over the heat energy generation element and communicates with an ejecting port for ejecting the ink. The inkjet head is characterized in that: the Ta layer is configured to extend to the connection part of the substrate and the flow channel constitution member; the connection part has an adhesion layer B made of inorganic material to enhance the adhesion between the Ta layer and an organic material; and the insulating protective layer and the adhesion layer B are not exposed to the flow channel.
YABE KENJI
Ishibashi Masayuki
Masaaki Ogata