Title:
INKJET RECORDING HEAD
Document Type and Number:
Japanese Patent JP2007260943
Kind Code:
A
Abstract:
To enhance yield and to reduce cost of a next generation head in a simple structure by corresponding to a high resolution head and by manufacturing a liquid fluid channel and an ejection nozzle in a semiconductor process.
A fluid channel 7 and an ejection nozzle 4 are formed by an SiN film on a substrate having a heater. The film is formed to a portion away from a cutting edge face so as to prevent chipping or cracking during the cutting. A pillar type wall 6 for reinforcement is formed in the identical process to be utilized against dust.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
OGAWA MASAHIKO
Application Number:
JP2006085589A
Publication Date:
October 11, 2007
Filing Date:
March 27, 2006
Export Citation:
Assignee:
CANON KK
International Classes:
B41J2/05; B41J2/16
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio