Title:
INSPECTING APPARATUS FOR EXTRANEOUS SUBSTANCE
Document Type and Number:
Japanese Patent JP3218726
Kind Code:
B2
Abstract:
PURPOSE: To obtain an inspecting apparatus for an extraneous substance which can discriminate the extraneous substance from a circuit pattern with high precision irrespective of the pattern on a surface to be inspected.
CONSTITUTION: A laser beam emitted from a laser light source 1 forms a beam spot on a surface 4 to be inspected, from an oblique direction, advancing via a vibrating mirror 2 and an f-θ lens 3 for scanning. A pattern diffracted light and an extraneous substance scattered light generated from the surface 4 by the application of the laser beam are sensed in virtually the same direction as the direction of incidence of the laser beam. An image on the eye plane of a light-sensing lens 6 is formed on a two-dimensional image sensor 9 by a relay lens 8 and the presence or absence of an extraneous substance is inspected on the basis of image information obtained from the image sensor 9.
Inventors:
Kinya Kato
Application Number:
JP26555492A
Publication Date:
October 15, 2001
Filing Date:
September 09, 1992
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01N21/88; G01N21/94; G01N21/956; (IPC1-7): G01N21/956
Domestic Patent References:
| JP247541A | ||||
| JP61201107A | ||||
| JP58147119A | ||||
| JP2227643A |
Attorney, Agent or Firm:
Yoshio Inoue