To provide an inspection apparatus for obtaining high inspection accuracy equivalent to the inspection apparatus using three cameras and advantageous to a cost, a dimension and workload for maintenance, and to provide an inspection method applied to the inspection apparatus.

The inspection apparatus is provided with two image pickup means selected from a C image pickup means having sensitivity in a light wavelength band of cyan (G+B), an M image pickup means having sensitivity in a light wavelength band of magenta (B+R) and a Y image pickup means having sensitivity in a light wavelength band of yellow (R+G), a defect extraction means for extracting defects based on patterns in inspected picked-up images obtained from the image pickup means and a quality determination means for determining quality based on the extracted defects. The inspection method is applied to the inspection apparatus.