Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2023048650
Kind Code:
A
Abstract:
To provide an inspection device and an inspection method for accurately aligning the positions of a substrate electrode and a probe.SOLUTION: A plurality of first targets 103 are provided to a probe card 100 and the same number of second targets 71 as the number of the first targets 103 are provided to a placement member. A detection unit is further provided. A control unit executes steps of: acquiring, using a first acquisition unit, the representative position of a probe 102 relative to a reference probe position; moving the placement member to a region below a second acquisition unit located in a region that does not overlap in a plan view with the probe card held by a holding unit and acquiring, using the second acquisition unit, the representative position of an electrode relative to a reference electrode position; acquiring a matching position where all of the first targets simultaneously come to have a prescribed positional relationship in a plan view with the second target 71 that corresponds to the first target; and acquiring a contact position at which the probe and the electrode are brought into contact with each other on the basis of the representative position of the probe 102 and the representative position of the electrode, and correcting the contact position on the basis of the matching position.SELECTED DRAWING: Figure 4
More Like This:
| JPH0836019 | CHARACTERISTIC MEASURING DEVICE |
| JP2012233861 | PROBE |
Inventors:
KONISHI KENTARO
Application Number:
JP2021158082A
Publication Date:
April 07, 2023
Filing Date:
September 28, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/66; G01R31/28
Attorney, Agent or Firm:
Kanemoto Tetsuo
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine