Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2023140043
Kind Code:
A
Abstract:
To provide an inspection device and an inspection method that can accurately reconstruct a processed shape of a cross section.SOLUTION: According to one embodiment, an inspection device having a measuring unit and a controller is provided. The measuring unit measures a physical quantity of a sample formed with a predetermined pattern according to the predetermined pattern. The measuring unit generates a first spectrum pattern according to a result of measurement. The controller applies a parameter to a shape function to predict a processed cross-sectional shape. The shape function indicates an amount of ion flux according to an etching depth in processing the predetermined pattern in dry etching processing. The controller determines a second spectrum pattern according to the predicted processed cross-sectional shape. The controller adjusts the parameter while comparing the first spectrum pattern and the second spectrum pattern with each other. The controller reconstructs the processed cross-sectional shape of the sample according to a result of adjustment.SELECTED DRAWING: Figure 7
Inventors:
IKEDA TAKAHIRO
ICHIKAWA HISASHI
HASHIMOTO TAKAKI
TANIZAKI HIROYUKI
ICHIKAWA HISASHI
HASHIMOTO TAKAKI
TANIZAKI HIROYUKI
Application Number:
JP2022045881A
Publication Date:
October 04, 2023
Filing Date:
March 22, 2022
Export Citation:
Assignee:
KIOXIA CORP
International Classes:
H01L21/66; G01B15/00; H01L21/3065
Attorney, Agent or Firm:
Sakai International Patent Office
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