Title:
INSPECTION DEVICE FOR INSPECTION OBJECT
Document Type and Number:
Japanese Patent JP2009175150
Kind Code:
A
Abstract:
To inspect the coating of an inspection object with good precision.
The coating inspection device 10 forms an ultraviolet ray image by receiving fluorescent light from the coating of a substrate 1 exposed to the ultraviolet rays, and forms a visible light image by receiving reflection light from the substrate 1 receiving the visible light. The coating inspection device 10 specifies the position of the substrate 1 using the visible ray image, and inspects the coating of the substrate 1 at least using the ultraviolet ray images among formed images. After correcting the position of the objective inspection image using the specified position of the substrate 1, the coating inspection also may be allowable.
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Inventors:
AKIYAMA YOSHIHIRO
YAGIZUME KENJI
MATSUURA TATSUYUKI
SAITO HIROSHI
YAGIZUME KENJI
MATSUURA TATSUYUKI
SAITO HIROSHI
Application Number:
JP2009013127A
Publication Date:
August 06, 2009
Filing Date:
January 23, 2009
Export Citation:
Assignee:
SAKI CORP KK
International Classes:
G01N21/88; G01B11/30
Domestic Patent References:
JP2009002703A | 2009-01-08 | |||
JP2004146108A | 2004-05-20 | |||
JP2002202290A | 2002-07-19 | |||
JPH0381547U | 1991-08-20 | |||
JP2000149781A | 2000-05-30 | |||
JPH0643109A | 1994-02-18 | |||
JPH05162294A | 1993-06-29 | |||
JPH08288642A | 1996-11-01 | |||
JPH06229933A | 1994-08-19 | |||
JP2002365224A | 2002-12-18 | |||
JP2009004610A | 2009-01-08 | |||
JPH08128916A | 1996-05-21 | |||
JP2007232472A | 2007-09-13 | |||
JP2009002703A | 2009-01-08 | |||
JP2004146108A | 2004-05-20 | |||
JP2002202290A | 2002-07-19 | |||
JPH0381547U | 1991-08-20 | |||
JP2000149781A | 2000-05-30 | |||
JPH0643109A | 1994-02-18 | |||
JPH05162294A | 1993-06-29 | |||
JPH08288642A | 1996-11-01 | |||
JPH06229933A | 1994-08-19 |
Attorney, Agent or Firm:
Sakaki Morishita
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