Title:
INSPECTION OF SUBSTRATE USING MULTIPLE CAMERAS
Document Type and Number:
Japanese Patent JP2014206547
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an apparatus and a method for automated optical inspection using multiple cameras to inspect an object.SOLUTION: An apparatus for inspection includes: an imaging assembly, including a plurality of cameras, which are mounted in different, respective locations in the imaging assembly and are configured to capture respective images of a sample; a motion assembly which is configured to move at least one of the imaging assembly and the sample so as to cause the imaging assembly to scan the sample with a scan accuracy that is limited by a predetermined position tolerance; and an image processor which is coupled to receive and process the images captured by the cameras so as to locate a defect in the sample with a position accuracy that is finer than the position tolerance. The image processor registers all the images of the sample recorded by the cameras during the scan, to determine global positions of the defects without accumulated error.
Inventors:
OFER SAPHIER
ISRAEL SHAPPIRA
YAAKOV DAVIDI
ISRAEL SHAPPIRA
YAAKOV DAVIDI
Application Number:
JP2014151456A
Publication Date:
October 30, 2014
Filing Date:
July 25, 2014
Export Citation:
Assignee:
ORBOTECH LTD
International Classes:
G01N21/956; G01B11/00
Domestic Patent References:
| JP2002181729A | 2002-06-26 | |||
| JP2001202520A | 2001-07-27 | |||
| JP2000321168A | 2000-11-24 | |||
| JP2004226128A | 2004-08-12 | |||
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Attorney, Agent or Firm:
Shuhei Matsuoka