Title:
INTERFEROMETER AND LIGHT WAVE LENGTH MEASUREMENT
Document Type and Number:
Japanese Patent JP3594335
Kind Code:
B2
Abstract:
PURPOSE: To enhance the accuracy of wave-length measurement by splitting an incident light beam into two beams advancing along two optical paths and by splitting another incident light beam having a known wave length into two beams advancing along two reference optical paths.
CONSTITUTION: A rotary peripscope 32 varies the length of first and second optical paths so as to form the difference in the length of the path, which varies in correspondence to the direction of the path. A beam splitter 30 splits an incident light beam into two light beams advancing along paths C, D, one of which reflects at a tandem reflector 50, reflects again at a parallel reflector 32a standing on the periscope 32, and then returns to the beam splitter 30, while the other of which reflects at the beam splitter 30, advances along the path D, reflects again at a relay reflector 52, and finally returns to the beam splitter 30. A reference beam is splitted by the splitter 30 into two beams advancing along two reference optical paths, one of which advances along the path A to reach a reverse reflector 32, while the other of which advances along the path B to reach another reverse reflector 36. Both beams return to the beam splitter 30 via the paths C, D, respectively.
Inventors:
Gregory M. Cutler
Application Number:
JP18983594A
Publication Date:
November 24, 2004
Filing Date:
July 20, 1994
Export Citation:
Assignee:
AGILENT TECHNOLOGIES, INC.
International Classes:
G01J9/02; G01B9/02; (IPC1-7): G01B9/02
Domestic Patent References:
| JP4064567B2 |
Foreign References:
| US4329055 |
Attorney, Agent or Firm:
Kimihisa Kato
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