Title:
INVERSION DEVICE AND SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
Japanese Patent JP2021030694
Kind Code:
A
Abstract:
To enable inversion of a substrate in a space-saving manner.SOLUTION: An inversion device 54 includes a shaft part 541, a first hand part 542, a second hand part 543, and an inversion part 544. The shaft part 541 is close to the side surface of a substrate piece. The first hand part 542 is attached to the shaft part 541 so as to be movable in the length direction of the shaft part 541, and moves to the small piece side of the substrate to hold a first main surface. The second hand part 543 is attached to the shaft part 541 so as to be movable in the length direction of the shaft part 541, and moves to the small piece side of the substrate to hold a second main surface. The inversion part 544 inverts the substrate piece by rotating the shaft part 541 about the axis while the first hand part 542 and the second hand part 543 hold the substrate piece.SELECTED DRAWING: Figure 2
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Inventors:
SAKAI TOSHIYUKI
NAKATA KATSUYOSHI
NAKATA KATSUYOSHI
Application Number:
JP2019156839A
Publication Date:
March 01, 2021
Filing Date:
August 29, 2019
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
B28D7/00; B28D5/00; B28D7/04; B65G47/248; B65G49/06; B65H15/02; H01L21/677
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation