Title:
ION IMPLANTING DEVICE
Document Type and Number:
Japanese Patent JP3420338
Kind Code:
B2
Abstract:
PURPOSE: To increase the throughput and to reduce the mixing of impurities, by increasing the potential at the center of a multipole static deflecting. system to the negative side compared to a substrate, and making the potential of an axisymmetric structure of electrode set between both members at the potential same as the substrate.
CONSTITUTION: The potential of an ion source 1 is made at a positive potential, the central potential of a multipole static deflecting system 4 is made at a negative potential, and the potentials of an axisymmetric structure of electrode 8 and a substrate 5 are made at a gland potential. And the deflecting system 4 is arranged at the front side of a mass separator 2, and the potential at the center of the deflecting system 4 is increased in the negative side compared to the substrate 5. Furthermore, the electrode 8 is provided between the deflecting system 4 and the substarte 5. As a result, ion beams are drawn out by the ion source 1 and the central potential of the deflecting system 4, the ion beams are deflected and focused by the separator 2 while keeping the kinetic energy corresponding to the potential difference, and the mass is separated by a mass spectrometry slit 3. The resultant ion beam is deflected by making an optical axis 6 passing through the deflecting center of the deflecting system 4 as the center, receives a convex lens function, and irraidates the substrate 5 being made parallel to the optical axis 6, regardless of its deflection angle.
Inventors:
Seiji Ogata
Yuzo Sakurada
Yuzo Sakurada
Application Number:
JP15794294A
Publication Date:
June 23, 2003
Filing Date:
June 15, 1994
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01J37/05; H01J37/08; H01J37/09; H01J37/317; H01L21/265; C23C14/48; (IPC1-7): H01J37/05; C23C14/48; H01J37/08; H01J37/09; H01J37/317
Domestic Patent References:
| JP4137346A | ||||
| JP330248A | ||||
| JP2250255A | ||||
| JP4230943A | ||||
| JP1167942A | ||||
| JP59151740A |
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)