Title:
ION SOURCE DEVICE
Document Type and Number:
Japanese Patent JP3503366
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To simply control a distribution of a current density of an ion beam without electrode replacement, obtain a desired distribution, and make an ion source device inexpensive.
SOLUTION: This device is provided with a cabinet for generating plasma and a porous electrode 1 in which a plurality of lead holes 2 for leading out an ion beam are formed by the plasma. In the lead holes 2, a member 3 partly and entirely decreasing a hole area of the lead holes 2 and having a pore area smaller than that of the lead hole 2 is disposed.
Inventors:
Takashi Mikami
Hiroya Kirimura
Shigeaki Kishida
Akinori Ebe
Kiyoshi Ogata
Hiroya Kirimura
Shigeaki Kishida
Akinori Ebe
Kiyoshi Ogata
Application Number:
JP30116896A
Publication Date:
March 02, 2004
Filing Date:
October 25, 1996
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
H01J27/02; H01J37/08; (IPC1-7): H01J27/02; H01J37/08
Domestic Patent References:
| JP6223760A | ||||
| JP2152150A | ||||
| JP8129982A | ||||
| JP62175559U |
Attorney, Agent or Firm:
Ryutaro Fujita