Title:
ION SOURCE FOR MASS SPECTROMETER
Document Type and Number:
Japanese Patent JP3836773
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an ion source for a mass spectrometer, wherein an inner chamber is easily attached to and detached from a base chamber, the stability of an ionizing current, an emission current, and ionization efficiency is excellent, and reproducibility is excellent.
SOLUTION: In this ion source, composed of the inner chamber disposed in a vacuum vessel to generate an ion inside and the base chamber formed so as to be able to detachably fix and hold the inner chamber, and structured so that the inner chamber is taken out from the vacuum vessel with the base chamber left in the vacuum vessel, an ionizing chamber and a filament to generate a thermion beam are disposed on the inner chamber side, and an electron trap to catch the thermion beam is disposed on the base chamber side. In addition, the connection between the base chamber and the inner chamber is made by fitting a current carrying pin to a cylindrical spring.
Inventors:
Masao Shimizu
Yoshihiko Miwa
Yoshikazu Kakita
Yoshihiko Miwa
Yoshikazu Kakita
Application Number:
JP2002300276A
Publication Date:
October 25, 2006
Filing Date:
October 15, 2002
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
G01N27/62; H01J49/14; (IPC1-7): H01J49/14; G01N27/62
Domestic Patent References:
| JP51045583A | ||||
| JP57202054A | ||||
| JP6068842A | ||||
| JP47018394A |
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