Title:
鉄−白金系スパッタリングターゲットおよびその製造方法
Document Type and Number:
Japanese Patent JP6937356
Kind Code:
B2
Abstract:
To provide a sputtering target in which quality and a yield of a magnetic recording layer can be improved by suppressing a sedimentation of a black carbon particle on a surface thereby reducing generation probability of abnormal discharge during a sputtering process, accordingly mitigating particle contamination of the magnetic recording layer.SOLUTION: An Fe-Pt based sputtering target is provided that includes iron(Fe), platinum (Pt) and carbon(C), wherein a carbon content is 15 atomic percentage(at%) or more and 45 at% or less based on a total amount of atoms of the Fe-Pt based sputtering targe, and a metallographic microstructure of the Fe-Pt based sputtering target has a carbon phase having an average size of 2 μm or less and an average aspect ratio of less than 3.SELECTED DRAWING: Figure 1
Inventors:
Luo Hongwen
Huang Wei
Chung Cheng
Cai Toan
Kure Tenji
Huang Wei
Chung Cheng
Cai Toan
Kure Tenji
Application Number:
JP2019227297A
Publication Date:
September 22, 2021
Filing Date:
December 17, 2019
Export Citation:
Assignee:
Koyo Materials Co., Ltd.
International Classes:
C23C14/34; B22F3/00; C22C5/04; C22C26/00; C22C38/00; G11B5/02; G11B5/65; G11B5/851
Domestic Patent References:
| JP5290468B2 | ||||
| JP2014132746A1 | ||||
| JP2016173871A |
Attorney, Agent or Firm:
Sakuo Yamaguchi
Nobuyuki Oshima
Shinjiro Yamaguchi
Nobuyuki Oshima
Shinjiro Yamaguchi